Novel Fabrication Routes of Metallic Micromembranes for In Situ Mechanical Testing
نویسندگان
چکیده
A methodology to miniaturize mechanical tests of metal alloys based on membrane deformation was developed in this investigation. The buildup new path for miniaturization requires small amounts material testing. This is particular interest irradiated structural nuclear materials. Micrometric metallic circular membranes were fabricated starting from thin alloy foils and using two different paths. Serial fabrication microspecimens performed by means successive focused ion beam (FIB) steps. On the other hand, high-throughput parallel achieved differential sputtering (DS) reactive etching followed a final fine FIB polishing flatten straighten response. Micro-punch spherical tips situ load–displacement curves recorded while monitoring test scanning electron microscope. values reached after testing DS more reliable than those samples, showing large stretching section higher maximum force (64 mN) displacement (22.2 μm). micro-punch work combines advantage facilitating interpretation response, producing bi-axial stress distribution during stretching, being amenable microspecimen fabrication.
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ژورنال
عنوان ژورنال: Metals
سال: 2022
ISSN: ['2075-4701']
DOI: https://doi.org/10.3390/met12030468